15_GaN FETS MATTHEW_KING - The Materials The MOSFET The GaN...

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The Materials The MOSFET The GaN MOSFET
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Chemical Reactions: 2 Ga + 2 NH3 2 GaN + 3 H2 Ga2O3 + 2 NH3 2 GaN + 3 H2O Crystal Can be grown usually on substrates through means of: Molecular-Beam Epitaxy (MBE), Metal Organic Chemical Vapor Deposition(MOCVD), or more recently entire crystals using Autoclaves
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Molar mass 83.73 g/mol Appearance yellow powder Density 6.15 g/cm 3 Melting point >2500°C[1] Solubility in water Reacts Refractive index (nD) 2.429 http://en.wikipedia.org/wiki/Gallium_nitride
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This is a gallium nitride crystal that was grown using an autoclave, by a group called Ammono. http://spectrum.ieee.org/semiconductors/materials/the-worlds-best- gallium-nitride/1
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http://www.ioffe.ru/SVA/NSM/Semicond/GaN/figs/fmd28_1.gif
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http://www.aethercomm.com/articles/9.pdf
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Can be doped to be N-type with either silicon or oxygen. Can also be doped to P-type with magnesium. Doping of Gallium Nitride has been preformed using ion implantation
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Sappire Wafer Silicon Carbide http://www.seikoh-giken.co.jp/en/business/sic.html http://www.zenithtech.com.tw/zen/products_more.asp?pid=714
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Gallium Nitride http://www.semiconductor- technology.com/projects/epitaxial_wafer_fab/epitaxial_wafer_fab4.html
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This note was uploaded on 08/23/2011 for the course ECE 3080 taught by Professor Staff during the Spring '08 term at Georgia Institute of Technology.

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15_GaN FETS MATTHEW_KING - The Materials The MOSFET The GaN...

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