ECE6450L1-Introduction Chap 1 and 2

ECE6450L1-Introduction Chap 1 and 2 - ECE 6450 - Dr. Alan...

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Unformatted text preview: ECE 6450 - Dr. Alan Doolittle Georgia Tech Lecture 1 Introduction to Microelectronic Technologies: The importance of multidisciplinary understanding. Reading: Chapters 1 and parts of 2 ECE 6450 - Dr. Alan Doolittle Georgia Tech Goal of this Course The goal of this course is to teach the fundamentals of Microelectronic Technology Emphasis will be placed on multidisciplinary understanding using concepts from Electrical Engineering, materials science/engineering, chemistry, physics, and mechanical engineering. Desired Outcome: Provide the student with enough basic information so he/she can understand literature related to his/her desired topic and allow him/her to begin developing new technologies. Image after Plummer, Deal, and Griffin (2000) ECE 6450 - Dr. Alan Doolittle Georgia Tech Disciplines ECE Electrical Design Electrostatic Field Control Electrical behavior and limits of materials and material systems Using defects for our electrical advantage Effects of strain and stress on device reliability Designing a better device, circuit, system Material Science Structural Classification of Materials: Crystal Structure Formation and control of defects, impurity diffusion Strain and Stresses materials Materials interactions (alloys, annealing) Phase transformations Chemistry Bonding Classification of Materials Etching and deposition chemistry Chemical cleaning Physics Quantum transport Solid state descriptions of carrier motion Mechanical Engineering Heat transfer Micro-machines-Micro Electro- Mechanical Machines (MEMS) Fatigue/fracture, (especially for packaging) etc... Mechanical stresses during processing (polishing, thermal cycles, etc) ECE 6450 - Dr. Alan Doolittle Georgia Tech Disciplines ECE Electrical Design Electrostatic Field Control Electrical behavior and limits of materials and material systems Using defects for our electrical advantage Effects of strain and stress on device reliability Designing a better device, circuit, system Material Science Structural Classification of Materials: Crystal Structure Formation and control of defects, impurity diffusion Strain and Stresses materials Materials interactions (alloys, annealing) Phase transformations Chemistry Bonding Classification of Materials Etching and deposition chemistry Chemical cleaning Physics Quantum transport Solid state descriptions of carrier motion Mechanical Engineering Heat transfer Micro-machines-Micro Electro- Mechanical Machines (MEMS) Fatigue/fracture, (especially for packaging) etc... Mechanical stresses during processing (polishing, thermal cycles, etc) Interested in the fundamental process Interested in the uses of these processes Interested in the uses of these processes ECE 6450 - Dr. Alan Doolittle Georgia Tech It is instructive to compare a EEs outlook to Microelectronic Fabrication to that of materials scientist....
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This note was uploaded on 08/23/2011 for the course ECE 6450 taught by Professor Doolittle during the Fall '10 term at University of Florida.

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ECE6450L1-Introduction Chap 1 and 2 - ECE 6450 - Dr. Alan...

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