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ECE6450L2-Introduction Chap 1 and 2-continued

ECE6450L2-Introduction Chap 1 and 2-continued - Lecture 2...

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ECE 6450 - Dr. Alan Doolittle Georgia Tech Lecture 2 Semiconductor Substrates Reading: Chapter 2
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ECE 6450 - Dr. Alan Doolittle Georgia Tech Phase Diagrams Only certain compositions of materials are allowed at a given temperature and pressure when the material is in thermodynamic equilibrium. These compositions can be described by “Phase Diagrams”. These allowed compositions effect semiconductor growth, and dictate the stability and electrical properties of metal- semiconductor contacts. A phase diagram contains a “map” of a materials state including liquid only, solid only, coexisting as liquid with solid, or even various crystal structures of solid phases verses changes in material temperature, composition or pressure. We will only examine phase diagrams at a single pressure.
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