ECE6450L6-Rapid Thermal Processing

ECE6450L6-Rapid Thermal Processing - Lecture 6 Rapid...

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ECE 6450 - Dr. Alan Doolittle Georgia Tech Lecture 6 Rapid Thermal Processing Reading: Chapter 6
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ECE 6450 - Dr. Alan Doolittle Georgia Tech Rapid Thermal Processing (RTP) (Chapter 6) Categories: Rapid Thermal Anneal (RTA) Rapid Thermal Oxidation (RTO) Rapid Thermal Nitridation (RTN) (and oxynitrides) Rapid Thermal Diffusion (RTD) Rapid Thermal Chemical Vapor Deposition (RTCVD) Silicides and Contact formation Advantages : 1.) Single wafer processing produces the best uniformity, especially for large wafer sizes. 2.) Minimize redistribution of dopants, minimal sqrt(Dt) with maximal D (high Temperature) allows repair of damage from ion implantation. 3.) Cold walls allow multiple processes to occur without cross contamination. 4.) Photochemistry can be exploited. Disadvantages: 1.) Absolute temperatures are almost never known. 2.) Nonthermal-equilibrium conditions make modeling and predicting difficult. 3.) Uniform heating is more critical than traditional furnace processing due to high ramp rates and the resulting stress. Definitions: stress: force per area => units are the same as pressure
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ECE 6450 - Dr. Alan Doolittle Georgia Tech RTP Physics Heat Flow Mechanisms can be related to temperature rise by: Where C p is the specific heat (a measure of how much energy a material can absorb before it manifests in a temperature rise), r is the gram/cm 3 density, and q-dot is the heat flow density (W/cm 2 ) Note your book is inconsistent on how it uses q-dot. Temperature ramp rate can be enormous!!!!! ) ( ) ( ) ( ) ( thickness x x C T q dt dT p ρ = Rapid Thermal Processing (RTP) 2 2 ) ( cm Second Joules cm Watts T q = =
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ECE 6450 - Dr. Alan Doolittle Georgia Tech Types of RTP 1.) Adiabatic : Excimer laser pulses (<uS) anneal the thin skin of material.=>huge vertical temperature gradients 2.) Thermal flux : rastering a focused beam (electron or laser) across a wafer. =>huge vertical and lateral temperature gradients 3.) Isothermal : Broad area optical illumination. => minimal temperature gradients. RTP Physics 3 types of Heat Flow Mechanisms: 1.) Conduction : Flow of heat between two bodies in intimate contact. Heat flow per unit area in a solid is expressed in terms of a solids thermal conductivity, k(T), as,
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This note was uploaded on 08/23/2011 for the course ECE 6450 taught by Professor Doolittle during the Fall '10 term at University of Florida.

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ECE6450L6-Rapid Thermal Processing - Lecture 6 Rapid...

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