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Unformatted text preview: EE40 Summer 2011 Neel Shah Homework 3 Due 7/19/2011 Problem 1. Motional Capacitance of an Inertial Sensor The Analog Devices ADXL-50 single-axis MEMS accelerometer is a classic inertial sensor design. A large proof mass is suspended by tethers which in turn are connected to the chip chassis. When the chip experiences acceleration, the chassis displaces while the mass initially stays still (due to inertia). The tethers flex and then pull the mass forward with a force equivalent to the acceleration experienced. The photo on the left shows the full device, and the diagram on the right shows the schematic version. The proof mass has several suspended fingers that interact with other fixed and grounded plates to form multiple movable capacitors. The cross-sectional area g = 100 G¡ ¢ , and the distance between the proof mass finger and the fixed grounded plates is £ ¤ = 4 G¡ when there is no motion....
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This note was uploaded on 09/09/2011 for the course EECS 40 taught by Professor Chang-hasnain during the Summer '08 term at Berkeley.
- Summer '08