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Unformatted text preview: I n C lass Presenta t ion: T ra nsm ission E lect ron M ic roscopy Transmit electron beam through thin sample Works like optical microscopy, similar to SEM Column must be kept in vacuum (10-5 10-10 Torr) o Avoids scattering of electrons o Maintain thermal/chemical stability o Minimize contamination of sample Very thin samples (<100 nm thick) Sample Prep o <100 nm thick o <20 nm for good resolution o Carbon coating keeps sample from being charged and wont affect image too much o Thinning Mechanical Planar (similar to grinding/polishing we did in lab) Dimple gives a thin area at center Wedge (beveled plane) For thin films, stack and glue films into tube and slice/thin Electrochemical Used for metallic conductors Jet polishing etching You know its done when you see the first hole Ion milling shoot inert gas ions to sputter away particles Used after mechanical thinning Imaging based on contrast from electron beam diffraction...
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- Spring '09