MSE2020LectureNotes_3_3

# MSE2020LectureNotes_3_3 - MSE 2020 Page 1 of 2 In class...

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MSE 2020 3/3/2011 Page 1 of 2 In class Problems See the worksheet = , = , = D δα α aperture half angle δ 60 = λ 60h2mE , therefore the aperture and voltage affect the depth of focus, not gun filament current o = D , δ r o = , = M P2r D P2Mα What is the wavelength of the Cu Ka emission? o = - = - = Ekα Ek EL 8979 933 8046 o = = = . - = . - E hcλ λ hcE 4 135x10 5 x 3x108 E 1 54x10 10 m Do you expect the spatial resolution of and image using backscattered electrons to be higher of lower than an image taken under the same conditions using the secondary electron? Give a reason for your answer using a diagram of the interaction volume. o BSE lower resolution than SE o SE always better resolution than BSE in both depth and width (laterally) o o Spot size r, affected by accelerating voltage o SE: only electrons near the surface make it out (surface sensitive) As you go to lower and lower operating voltages, do you expect the resolution of your

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MSE2020LectureNotes_3_3 - MSE 2020 Page 1 of 2 In class...

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