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13-microfabrication

13-microfabrication - CHAPTER CHAPTER 13 Microfabrication...

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CHAPTER 13: Microfabrication Processes & Nanomanufacturing Manufacturing Processes Prof. T. Özel
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Fabrication Sequence for Integrated Circuits • Microfabrication processes are utilized in fabrication of components and systems for microelectronics, optical networking equipment, personal computers, cellular phones, information systems, automotive control and telecommunications. • Integrated circuit (IC) technology is basically processing of silicon as semiconductor material. FIGURE 13.3 General fabrication sequence for integrated circuits. Manufacturing Processes Prof. T. Özel
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