Homework_3_Solution

Homework_3_Solution - 3) Gross defects 5. List and describe...

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Dr. Byoung Hee You TECH 4392, MFGE 4392, and TECH 5392 Solutions: Homework#3 1. Describe an amorphous material. Why is this unacceptable for the silicon used in wafers? Ans) Amorphous materials have structural disorder at the atomic level, lack a repetitive structure. Most electrical and mechanical aspects of materials occur at the atomic level. Therefore, amorphous materials would be unacceptable for the silicon used in wafers. They have low predictability and repeatability in mechanical and electrical properties. 2. What is Miller indices, and what do they indicate? Ans) Miller indices describes crystal planes and their directions as following; parentheses ( ) a specific plane, bracket < > equivalent direction 3. Draw a picture of the following three crystal planes: (100), (110), and (111). Ans)
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Dr. Byoung Hee You 4. List three general forms of crystal defects. Ans) 1) Point defects 2) Dislocations
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Unformatted text preview: 3) Gross defects 5. List and describe three types of point defects. Ans) 6. List basic process steps for wafer preparation. Ans) Dr. Byoung Hee You 7. What is the purpose of wafer lapping and edge contour? Ans) - two-sided lapping removing damage left by slicing achieving high parallelism and flatness - edge contour contouring a smooth radius preventing cracks and crevices 8. List seven wafer quality requirements for a silicon wafer. Ans) 1) Physical dimensions: diameter, thickness, flat, and wafer deformation 2) Flatness 3) Microroughness: maximum and minimum height deviation, RMS 4) Oxygen content: by using cross-section, composition analysis of silicon crystal structure 5) Crystal defects: per cm 2 (less than 1,000) 6) Particles: per m 2 (less than 1,300), particle size (greater than 0.08 m) 7) Bulk resistivity: uniform resistivity through the bulk...
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Homework_3_Solution - 3) Gross defects 5. List and describe...

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