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Unformatted text preview: the interior of the liquid and toward its surface. 5. What is CTE? Ans) Coefficient of thermal expansion (CTE) 6. List three common acids used in wafer fab. Ans) Hydrofluoric acid, Hydrochloric acid, Sulfuric acid, BOE, Phosphoric acid, Nitric acid, Boron Tribromide, and Phosporus Oxychloride. 7. List three common bases used in wafer fab. Ans) Hydrogen peroxide, Ammonium hydroxide, Potassium hydroxide, and Tetramethyl ammonium Hydroxide. 8. List three common solvents used in wafer fab. Ans) Deionized Water, Isopropyl alcohol, Trichloroethylene, Acetone, and Xylene....
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- Spring '11
- Sulfuric acid, Dr. Byoung Hee