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Homework_6_Solution - Dr Byoung Hee You 5 Show LOCOS(Local...

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Dr. Byoung Hee You TECH 4392, MFGE 4392, and TECH 5392 Solutions: Homework#6 1. Draw and explain the atomic structure for silicon dioxide. Ans) A silicon dioxide has a form of a silicon atom surrounded by four oxygen atoms as following, 2. Describe how SiO 2 can be used as a dopant barrier. Ans) SiO 2 is an effective barrier to selectively introduce dopants into the silicon surface as following,
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Dr. Byoung Hee You 3. State the consumption of silicon during oxidation. Ans) 1000 Å 460 Å of Si is consumed 4. Describe rate of oxide growth using Fig. 10.12. Ans) There are two growth stages including the linear stage and parabolic state
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