Homework_7_Solution

Homework_7_Solution - Dr. Byoung Hee You TECH 4392, MFGE...

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Dr. Byoung Hee You TECH 4392, MFGE 4392, and TECH 5392 Solutions: Homework#7 1. List thin film characteristics for an acceptable thin film. Ans) 1) Good step coverage 2) Ability to fill high aspect ratio gaps (conformality) 3) Good thickness uniformity 4) High purity and density 5) Controlled stoichiometries: uniform composition 6) High degree of structural perfection with low film stress: grain size 7) Good electrical properties 8) Excellent adhesion to the substrate material and subsequent films 2. List three problems of nonconformal step coverage in thin film deposition. Ans) 1) High stress resulting in substrate deformation 2) Electrical shorts 3) Undesirable induced charges 3. State three stages in film growth. Ans) 1) Nucleation → forming isolated patches of film. 2) Coalescence → randomly oriented island grow based on the surface mobility and the density of the clusters. 3) Undesirable induced charges → island clusters form solid sheet that spreads
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Homework_7_Solution - Dr. Byoung Hee You TECH 4392, MFGE...

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