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Unformatted text preview: 9) Contaminants and particles 10) State three stages in film growth. Dr. Byoung Hee You 3. List eight steps of photolithography. Ans) 1) Vapor prime 2) Spin coat 3) Soft bake 4) Alignment and Exposure 5) Post-exposure bake 6) Develop 7) Hard bake 8) Develop inspect 4. What is the role of soft baking Ans) 1) Improves photoresist-to-wafer adhesion 2) Promotes resist uniformity on wafer 3) Improves line width control during etch 4) Drives off most of solvent in photoresist 5. What is the role of hard baking Ans) 1) Evaporate remaining solvent 2) Improve resist-to-wafer adhesion...
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- Spring '11