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lec25 - Lecture Tuesday Chemical Vapor Desposition SiH2 can...

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Lecture Tuesday 4/15/08 2 2 2 2 2 2 4 ~ ~ ~ ~ H S S SiH S SiH S SiH H SiH SiH + + + Chemical Vapor Desposition SiH 2 can be thought of as an active intermediate (rate limiting) 2 2 2 2 2 2 4 4 SiH s dep s SiH SiH v SiH A AD p SiH H SiH g SiH f k r r k f f P k r k P P P k r = = - = - = - v SiH SiH s dep v SiH SiH SiH SiH SiH v SiH A AD SiH s dep f P k k r f P k f k f f P k r f k r 2 2 2 2 2 2 2 2 2 / 0 / = = - = =
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Area Balance 4 2 4 4 4 2 4 2 2 4 2 2 2 4 4 2 2 2 2 2 2 2 2 2 0 1 1 1 1 1 SiH H SiH SiH p SiH H p SiH SiH S dep H p SiH SiH p SiH H SiH g SiH SiH SiH SiH SiH S dep
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