Lecture Tuesday
4/15/08
2
2
2
2
2
2
4
~
~
~
~
H
S
S
SiH
S
SiH
S
SiH
H
SiH
SiH
+
→
⋅
⋅
↔
+
+
↔
Chemical Vapor Desposition
SiH
2
can be thought of as an active intermediate
(rate limiting)
2
2
2
2
2
2
4
4
SiH
s
dep
s
SiH
SiH
v
SiH
A
AD
p
SiH
H
SiH
g
SiH
f
k
r
r
k
f
f
P
k
r
k
P
P
P
k
r
=
=
-
=
-
=
-
v
SiH
SiH
s
dep
v
SiH
SiH
SiH
SiH
SiH
v
SiH
A
AD
SiH
s
dep
f
P
k
k
r
f
P
k
f
k
f
f
P
k
r
f
k
r
2
2
2
2
2
2
2
2
2
/
0
/
=
=
⇒
-
=
≈
=
This
preview
has intentionally blurred sections.
Sign up to view the full version.
Area Balance
4
2
4
4
4
2
4
2
2
4
2
2
2
4
4
2
2
2
2
2
2
2
2
2
0
1
1
1
1
1
SiH
H
SiH
SiH
p
SiH
H
p
SiH
SiH
S
dep
H
p
SiH
SiH
p
SiH
H
SiH
g
SiH
SiH
SiH
SiH
SiH
S
dep
This is the end of the preview.
Sign up
to
access the rest of the document.
- Spring '11
- Fogler
- pH
-
Click to edit the document details