VLSI_Class_Notes_2_Scan_graphics

VLSI_Class_Notes_2_Scan_graphics - 2m Dopants I 0 |_0...

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Unformatted text preview: 2m? . Dopants I 0 | _0 SlllCOn Atom uh» . : ' “1!: 4:0: :M‘ flu; la: 4' =94 =3 M fl-" _0 ‘|3|=‘|:|"_L| I|_fl=fl=fl m | J J - u _.“o||.roflo mum «a w“. mum __ __ t __ g 1; g Ll n u g g L! g M W4 ““b‘ ' 9M _r==fl _LL1!=L' . 11:! ' . _o=!! II II Implanted Dopants II If X ‘..__, Crystals with different E E E Orientations. Polycrystalline silicon. + 0 ,5" Silicon 0+ Wafer Ion Implantation. (I) _ (b) - (6) (d) Fig. it Chunnding and random oficnlmiiuns in a crystal Innicc. {:1} Viewed along (1(0) axis- {h} "film! In" " away from (no) nxi; [c] Viw'cd along (IDO) autis- (d) Tiltcd T' with rapes-t to (I00) axis. ...
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