MEMS_12 guirenemerging tech_01

MEMS_12 guirenemerging tech_01 - Soft lithograpgy A...

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Soft lithograpgy A relatively new microfabrication arsenal Covering many new techniques Replica molding, microcontact printing, etc All these methods use a patterned elastomer as a stamp, mold or mask to generate micropattern and structure instead of a rigid photomask Advantages: better than conventional method for Patterning of nonplanar substrates, Unusual materials and Large areas Fast Low cost
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Soft lithograpgy Process for PDMS Make a mask using transparent with high resolution printer (> 3300 dpi) Coat SU-8 resist on substrate Expose UV light with the contact mask to develop Treat the SU-8 unexposed Cast PDMS Cure Peel off
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Soft lithograpgy Advantages of PDMS: Can be used as a stamp Low interfacial free energy Chemically inert And many …… Disadvantages Hydrophobic Absorb protein Shrinkage during curing (~1%) Swelling by nonpolar solvents (e.g. hexane) Thermal expansion Deformation of the soft elastomeric stamps Limited resolution
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Soft lithograpgy However, features of 30–50-nm dimension have been produced using PDMS stamps with stamp features of 400 nm and illuminated with 436-nmUV source ( Odom, et al., J. Am. Chem. Soc., 2002. 124: pp. 12112) (A and B) Scanning electron micrographs (SEM) of rings of photoresist produced at the edges of a phase-shifting mask patterned
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MEMS_12 guirenemerging tech_01 - Soft lithograpgy A...

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