MEMS_09 guirenemerging tech_01

MEMS_09 guirenemerging tech_01 - Chapter 1 Emerging...

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Chapter 1 Emerging lithographies technologies
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Emerging lithographies technologies Emerging lithographies technologies Proximal probes lithograpgy Very thin to monolayer lithography Soft lithography 3-D lithography Holography lithography Stereolithography Lithography on nonplanar substrate using high resolution linear and rotating stage Enable a few nm in size Terahertz switching speed
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Scanning probe lithography STM/AFM background Scanning tunneling microscope (STM) Imaging surface of conductive material with atomic scale detail Invented in 1986 There are many other new proximal probes Common feature: resolution is not determined by the visible light Measuring 0.1 nm range
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Scanning probe lithography Principle: Bring a conductive probe tip up to a conducting surface When the probe is close to the surface (<1 nm) and a +/-10V voltage is supplied, a very small current is generated Since electron in the probe and surface have wave function extending beyond the physical surface boundary If the extends where the spillover overlaps, a measurable current is produced The current depends exponentially on the spacing, e.g. 10/0.1 nm)
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Scanning probe lithography Principle: Piezo transducer is used to control the distance The probe scans and sees the atomic contour over the surface Image is formed by the STM from the electronic structure as well as from the geometry of the sample
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