BioMEMS_guiren_01_introduction_10-01-09

BioMEMS_guiren_01_introduction_10-01-09 - Bio- MEMS and...

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Bio- MEMS and NEMS (Bio- Micro Electromechanical System and Nano Electromechanical System ) Guiren Wang Tel: 777-8013; email: [email protected] Department of Mechanical Engineering University of South Carolina, Columbia
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Multidisciplinary If you do not understand, please let me know If you have any questions, my office hours are as follows; Tuesday 6:00 PM – 7:00 PM Friday 6:00 PM – 7:00 PM If you require additional time, or if my office hours conflict with your schedule, please see me to schedule an appropriate time.
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Textbook and reference books There are many textbooks available for MEMS Textbook Fundamentals of MICROFABRICATION: The Science of Miniaturization, Second Edition Marc J. Madou ISBN: 9780849308260 Reference books Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition, Sergey Edward Lyshevski, 2005. ISBN: 9780849328381 Microsystem Engineering of Lab-on-a-Chip Devices by Geschke, Oliver / Klank, Henning / Telleman, Pieter (eds.), 2008 ISBN-10: 3-527-31942-5 MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering by Hsu, Tai-Ran, 2008, ISBN-10: 0-470-08301-8
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Course objective Design and analyze MEMS NEMS (in the following MEMS represents both MEMS and NEMS) devices Demonstrate a basic understanding of principle and processes of MEMS device fabrication Demonstrate working knowledge of MEMS processing steps Demonstrate working knowledge of MEMS components of devices Demonstrate working knowledge of MEMS device testing and characterization Analyze the impact of packaging on device design Make reasonable decisions about the microfabrication options and performance of new MEMS devices and systems Geschke et al (2008)
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Grading Undergraduates Graduates Homework + Quizzes 40% 30% Middle Examination 25% 20% Final Examination 35% 30% Project 20%
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Introduction
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Fundamentals of Microfabrication Fundamentals of Microfabrication explore the science of miniaturization: the science of making very small things Technologies used to make a wide variety of materials into small devices: Micromaching Nanomachining Nanochemistry (molecular engineering) Artificial intelligence Biomimetics Smarter materials Others 1959
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Why MEMS? Minimize energy, materials and sample use in manufacturing, test and consumption Integration with electronics Reduction of power budget Faster devices Increased selectivity and sensitivity Exploitation of new effects through the breakdown of continuum theory in the micro-domain Exploitation of new science and effects in nanoscale Cost/performance advantages Improved reproducibility (batch fabrication) Improved accuracy and reliability Minimally invasive (e.g. implanted medical device) Parallel operation Portable Improve living standard Revolutionary impact in life science: lab on a chip, point of care
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This note was uploaded on 10/03/2011 for the course BMEN 589 taught by Professor Wang during the Spring '11 term at South Carolina.

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BioMEMS_guiren_01_introduction_10-01-09 - Bio- MEMS and...

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