Homework10_Solution

Homework10_Solution - Problem 1 PaQe 42 Jaeger 2.4(D Course...

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Unformatted text preview: _, Problem 1) PaQe 42, Jaeger 2.4 (D Course: EEE 5322 VLSI Circuits and Technology Homework #10 Professor Dr. William R. Eisenstadt Homework clue: Friday Sept 25,2009 “777(4) “W +J’Pe 07‘ ﬁhv/oreizd» Murz‘be Llﬁed 512/792 am 17‘ ,7, l 1 z 1' 1 1‘ i f »-‘ —-¢————+ -—~1 1 1 . l l 1 1 1 E 1 '1 1 1 . ‘ 1 1 1 1 1 . ; M “MM... 1 , 1 . 1 1 1 1 1 1 l ‘ 1‘ . 1 7‘59, 7,55% ,,’.”,5?§K Eve/.1: K /J WMISIM 11.011010 , (Mfr/11+ MAI/£1019” 41W , meta/912:1 J 11201,. £0 14.1.0.1 10201156011000 02?, 50011112111 - [an/7M” Ire/(l l??1l§‘k”J , ,, , . ,, 7110 21000101201010.1711, Q 0 (#4157017 Ame/ow _ ,,,Negqt7ye,,. ,,,_,,€9 (00101-6 ,, 10/011001 629411121 8) ”1910/ 212/; [Doc/11,10 10110100101501 024--.,0101100012/1111020, 21.210110221131111..- 0111/1 x 7‘ 759 9105/} Wi/ofmm‘m/y . IJ 7‘69 (Wad— @021 T5 17/3494] 7‘0 #12 #6441104 fwe/ ., .J...,,ﬂ!e 122825111, .,,,/eu.e:/ .15-,9134911‘, 7‘0 .7661» ,12121‘11175:.1€L:e/,, W (mm/9,1 7 H “M W 1 , 5311/ mast 2‘0l/om/9 7’er 14/51" muff 19 0/19020/ 1‘0 7569 phat/mgr per/fel‘l) 01), 7976, 11.14%1» (30K) 95 = --g _ (EM) (005:) 7h“: (0,” it 71.4! «in! I a!“ 0/771.“ # 775E CV0 0/) y " 4090/ V77). ‘ flu 0/} ﬁle my. k\ Course: EEE 5322 Name: Taesong Hwang (a) VLSI Circuits and Technology UFID: 28112158 Homework #10 " M ' " " M '2 ‘ " 'W WWI Isens a ”mm" ~‘"‘”'““ ““” “‘mww‘” m—WéW‘ ‘M'W" 2. Average etch rate is 10nm/sec, etch variation is + 5% ———— v _. ' -1 — _ 7 3. Selectthymy tW' ' Q " "— ~ ~ -- — “e—tsaecﬁmywofwiywhotoresist—is-WWJcWa—v ' ‘ --————-—~—~—-v—w——-—~~—~——-——— ___1_____A.5..IaacmuntiaLpnoceswLiaiiQn_the_m/ﬂ§t¢l time is 20% __ .. Eli/Jam; ,3 [1% #ng _Iioﬂmfl:% __ ____ mm 510%?“ __M w :: Wt-“ _ “— _-__- “ ova/fem 1mm 492. ,1, __ _, " _ m 1 "7; 1 + *0 I: “m” WW 0— “1":sz y“); ': ___ “ " :“” 7';- W —'—"_ W” "~— “ D —_ 9 777’ 3.7" [e- " (4’19 .‘1 ll ‘9”!lillll — W IT/mw 7x +th *S‘wm —/\$‘°/o - E7! 7’} u lon +9. -- no (sperm (-7» " IGC “" ‘ b _ = - /D/)M \$9 ( /+§% é) 7’)“ ll“ 114E {111-5 P5» ml. 4419 3‘ ﬂzd‘f—XFOXT —3 sec X lo 4" a O Q I A“ I 3;! . +re¢ 7) maxrmcm 4/" Jeff 2:: ”DIM/97 ‘m 7t r m7n = How — N9 . u =._ (BEAM/I 7") 171.7» 7mm Mac/cw; : I!» I) ' —— _ I!» M” “*7 7 , If H. . 0 AM u M (£3 lav‘em/ ' 4., 1‘ _ — 3‘! 7o f‘u’ I maﬁmw‘n' Wem/ PM 4% 46e pol: ~ I’M/Z Tm‘e ‘ 7 W, = . W 73 I ' [90150.11 ‘11 Mu‘ - 1.4‘ 09" ‘9 3'" MI' (/00 _. 'o 1’ 4 2 ' r” 0 ’ ”I ‘h’ Pf”? ‘5 ; Wffﬂq/ Pit/5 WP .. 7 .— =:_ ‘gxgwm/ MA 1:“ = r- 1 ‘7', VI I 7L1”, = Ema x ‘— 198.795nm 7r Mam Wm/ PM 4+ #19 T WWW.— F ; #713. 4&0»; w < @ Wk. 79 - M707MU1/ ’gN ”Mu/1‘11 £1. gm My.“ Tep‘po/yﬂom : 900/”)? ~ 21N1u7n : 900007 ~72. ﬂy. \$1 ‘ 1'4 W 7. Ma TMUM A! 44“: 943. Mm A MWmum ’ 0on =- [813 +J—(8‘33Mm = 3‘3Q. Du = 4/3. //7m + ”9. 5/1/14 ...
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