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VLSI_Class_Notes_9_Graphics

VLSI_Class_Notes_9_Graphics - Plasma is Ionized gas Energy...

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Unformatted text preview: Plasma is Ionized gas. Energy can be added to ionized gas using elec- tric and magnetic fields. Ionized inert or reactive gases. Ar .9100‘9". Silicon Wafer Can be heated. Spin on Techniques: Solution of material you want to deposit is dropped on the wafer and spun. Uniformly distribute material over. (Photo-resist used in image transfer, and oxide layer) 0 Reactant Gas All the species required to form the material being deposited. l w Q‘fijlt TB Br quflev 5 Afifeuals 0‘0 'Wa W anal d. ' HF? << .SCt4 . 19-0‘ /’ ...
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VLSI_Class_Notes_9_Graphics - Plasma is Ionized gas Energy...

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