VLSI_Class_Notes_20_t37b_lo_epi-params

VLSI_Class_Notes_20_t37b_lo_epi-params - MOSIS PARAMETRIC...

Info iconThis preview shows pages 1–2. Sign up to view the full content.

View Full Document Right Arrow Icon
MOSIS PARAMETRIC TEST RESULTS RUN: T37B (LO_EPI) VENDOR: TSMC TECHNOLOGY: SCN025 FEATURE SIZE: 0.25 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: TSMC 0251P5M TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.36/0.24 Vth 0.47 -0.50 volts SHORT 20.0/0.24 Idss 591 -256 uA/um Vth 0.48 -0.54 volts Vpt 7.6 -7.2 volts WIDE 20.0/0.24 Ids0 13.2 < 2.5 pA/um LARGE 50/50 Vth 0.42 -0.59 volts Vjbkd 5.9 -7.0 volts Ijlk <50.0 <50.0 pA Gamma 0.44 0.62 V^0.5 K' (Uo*Cox/2) 126.5 -24.8 uA/V^2 Low-field Mobility 417.63 81.88 cm^2/V*s COMMENTS: Poly bias varies with design technology. To account for mask bias use the appropriate value for the parameters XL and XW in your SPICE model card. Design Technology XL (um) XW (um) ----------------- ------- ------ SCN5M_DEEP (lambda=0.12) 0.00 -0.04 thick oxide, NMOS -0.01 -0.04 thick oxide, PMOS -0.06 SCN6M_SUBN (lambda=0.15) -0.06 0.00 thick oxide, NMOS -0.10 0.00 thick oxide, PMOS -0.15 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >6.6 <-6.6 volts PROCESS PARAMETERS N+ P+ POLY N+BLK PLY+BLK MTL1 MTL2 UNITS Sheet Resistance 4.0 3.0 3.5 59.6 170.5 0.07 0.07 ohms/sq Contact Resistance 5.7 4.8 4.7 2.23 ohms Gate Oxide Thickness 57 angstrom
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Image of page 2
This is the end of the preview. Sign up to access the rest of the document.

Page1 / 4

VLSI_Class_Notes_20_t37b_lo_epi-params - MOSIS PARAMETRIC...

This preview shows document pages 1 - 2. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online