Fundamentals of Microfabrication Exam 1 Review Sheet 1/15/02 Know the following: 1. Know the basic history of MEMS and know why silicon is so important. 2. Basic relationships of crystallographic planes and why they are important in MEMS 3. Know how silicon wafers are prepared, and what the basic dopants are. 4. Basic materials science such as stress, strain, toughness, and how these parameters vary between material types. 5. Understand the important parameters in photolithography including: the difference between positive and negative resists, how resolution is determined, the influence of light intensity and frequency, and what the various photoresists might be used for. 6. Know the steps in the photolithography process and what the purpose of each step is. 7. Understand the differences between mask types and how masks can be designed. 8. Know the different types of dry etching systems and the advantages and disadvantages of each. This includes RIE, plasma, DRIE, reverse sputtering, etc. Be
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