Unformatted text preview: 5. Be aware of the key application areas of MEMS and how these systems work. Know why these systems work well on the microscale (i.e. scaling effects). 6. Know which applications have been successfully commercialized. 7. Several questions will be taken directly out of the textbook and may not have been discussed in class. 8. The first section of the final will be similar to the first two tests. Studying the earlier tests would likely be profitable. 9. The second portion of the test will be a design problem. You will be asked to give the fabrication procedures and mask layouts you would use to generate a useful MEMS device. I will try to pick a design question that will require you to know only basic physics and engineering....
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- Fall '04
- Microfabrication, micromachining