Lab 04 Pattern Generation

Lab 04 Pattern Generation - Fundamentals of...

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Unformatted text preview: Fundamentals of Microfabrication Pattern Generation Laboratory 1. Draw pattern in AutoCAD LT a. Use 3 x 3 mask Go to Import/Export DXF >> DXF in, on C:\, select 3x3mask.DXF b. Pick layer color other than white c. Use PLINE and SOLID commands enter coordinates as indicated d. Save to A:\ as *.DXF 2. Convert *.DXF to *.GDSII format in LinkCAD a. DXF Import Options Set 1 m in DXF is 1 m in GDSII, check all boxes b. DXF Export Options Leave a default c. Repair open polygons errors on top, check repair options, hit repair, then view in View window d. Select Layer turn off (bulbs in right frame) all other layers e. Convert file, with name *.GDSII 3. Convert *.GDSII to *.DWM using program gds2pg a. Open GDSII file b. Hit Open to create CFG file c. Hit OK on structure selection d. Go to Options >> Layers i. Select layers in check boxes ii. Name file as *.DWM e. Hit Translate f. Got to View PG Right click and use Zoom and Measure functions to verify changes that may have happened...
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