Lecture 01 Introduction to MEMS

Lecture 01 Introduction to MEMS - Introduction to MEMS...

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Introduction to MEMS Bruce K. Gale Mechanical Engineering Department BIOEN 6421, ELEN 5221, MEEN 5960 and 6960 Overview ! What is micromanufacturing and MEMS? ! Why the interest in MEMS? ! IC Fabrication Processes ! Bulk Micromachining Processes ! Surface Micromachining Processes ! Combined Processes ! References MEMS - evolved from the Microelectronics Revolution IC Industry Timeline 1999 10 million transistors 1947 single transistor 1958 first IC Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utilization of microfabrication technology or “microtechnology”. So what exactly is MEMS?
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MEMS Examples pressure sensors accelerometers flow sensors inkjet printers deformable mirror devices gas sensors micromotors microgears lab-on-a-chip systems MEMS Timeline 1980 2030 1999 (1.3 million micro-mirrors) TI DMD ? Bulk micromachined pressure sensor The Opportunity of MEMS Technology General MEMS Advantages ! Batch fabrication – Reduced cost ! Reduced size – Is everything better smaller? ! Reduced power ! High precision ! New capabilities? ! Improved performance?
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Cleanroom plus microfab processes + Micromachining Processes ! Standard Integrated Circuit (IC) Processes – Identical to those used in IC fabrication – Generally used for surface micromachining ! Surface Micromachining – Additive processes ! Bulk Micromachining – Subractive Process ! Dividing line can become very blurry
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This note was uploaded on 11/16/2011 for the course MSE 5960 taught by Professor Douglas during the Fall '04 term at University of Florida.

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Lecture 01 Introduction to MEMS - Introduction to MEMS...

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