Lecture 15 Polymers for Microfabrication

Lecture 15 Polymers for Microfabrication - Can We Measure...

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1 October 9, 2001 Microfabrication Using Polymers Dr. Bruce K. Gale Microsystems Principles ENGR 494C and 594C October 9, 2001 Microsystems Principles Can We Measure Everything? October 9, 2001 Microsystems Principles Polymers for Microfabrication • Examples diverse – PDMS – PMMA – Polyurethane – Polyimide – Polystyrene • Disadvantages – Low thermal stability – Low thermal and electrical conductivity – Techniques for fabrication on microscale not as well developed • Advantages over silicon – Inexpensive – Flexible – Transparent to visible/ UV – Easily molded – Surface properties easily modified – Improved biocompatibility or bioactivity October 9, 2001 Microsystems Principles PDMS • Polydimethylsiloxane • Advantages – Deforms reversibly – Can be molded with high fidelity – Optically transparent down to ~300 nm – Durable and chemically inert – Non-toxic – Inexpensive October 9, 2001 Microsystems Principles Soft Lithography • Developed by Whitesides, et. al. at Harvard • Microcontact printing – Elastomeric stamp – Patterns of self-assembled monolayers (SAMs) and proteins – SAMs allow a variety of surface modifications • Thickness variation by changing tail length • Modification of tail group changes surface properties • Variety available for different substrate materials – Other SAM advantages • Self healing and defect rejecting • Ultrathin resists and seed layers • Do not require clean room facilities •L ow c o s t
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2 October 9, 2001 Microsystems Principles Micro Contact Printing October 9, 2001 Microsystems Principles Soft Lithography: MIMIC • Polyurethane or other material wicks into capillaries formed in PDMS stamp Soft Lithography Used To Fabricate Transistors On Curved Substrates October 9, 2001 Microsystems Principles Microtransfer Molding • A filled mold is reversed and liquid material is cured October 9, 2001 Microsystems Principles Soft Lithography: Replica Molding • Similar to fabrication of PDMS stamp, but another material is used • Flexible mold easily removed • PDMS non reactive and low surface energy October 9, 2001 Microsystems Principles Soft Lithography October 9, 2001 Microsystems Principles Soft Lithography
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3 October 9, 2001 Microsystems Principles Multilevel Structures October 9, 2001 Microsystems Principles Multilevel Microfluidic Systems October 9, 2001 Microsystems Principles Rapid Prototyping • How do we get around turn-around times associated with MEMS? • Chrome masks are expensive >$400 (the more detailed, the
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This note was uploaded on 11/16/2011 for the course MSE 5960 taught by Professor Douglas during the Fall '04 term at University of Florida.

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Lecture 15 Polymers for Microfabrication - Can We Measure...

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