Lecture 17a Microelectronics Integration with MEMS

Lecture 17a Microelectronics Integration with MEMS - : Low...

Info iconThis preview shows pages 1–3. Sign up to view the full content.

View Full Document Right Arrow Icon
SYSTEM INTEGRATION Dr. Bruce K. Gale Fundamentals of Micromachining sensor electronics actuator System Integration • Interfacing of electronics with sensors/actuators – (decision making capability or intelligence) Integration of chemical, mechanical, biochemical or optical microsystems with electronics circuit design and simulation Monolithic Integration circuit fabrication at a foundry fabricated microsystem on a chip with circuits Accelerometer Gas sensor
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
•Pre-IC fabrication •Co-IC fabrication •Post-IC fabrication Post-IC fabrication requires
Background image of page 2
Background image of page 3
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: : Low temperature < 450 C Benign chemical environment Benign radiation requirement System Integration Summary of steps Circuit design and simulation CMOS circuit fabrication at foundry Co- and Post-IC MEMS fabrication System packaging Micrograph of pressure sensor array MEMS pressure sensor array Electronics Hybrid or Modular Integration 3-D Packages 3-D Packages Folded Packaging Both passive and active components included in this hearing aid...
View Full Document

Page1 / 3

Lecture 17a Microelectronics Integration with MEMS - : Low...

This preview shows document pages 1 - 3. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online