Lecture 17a Microelectronics Integration with MEMS

Lecture 17a Microelectronics Integration with MEMS - •Low...

Info icon This preview shows pages 1–3. Sign up to view the full content.

View Full Document Right Arrow Icon
SYSTEM INTEGRATION Dr. Bruce K. Gale Fundamentals of Micromachining sensor electronics actuator System Integration Interfacing of electronics with sensors/actuators – (decision making capability or intelligence) Integration of chemical, mechanical, biochemical or optical microsystems with electronics circuit design and simulation Monolithic Integration circuit fabrication at a foundry fabricated microsystem on a chip with circuits Accelerometer Gas sensor
Image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
•Pre-IC fabrication •Co-IC fabrication •Post-IC fabrication Post-IC fabrication requires
Image of page 2
Image of page 3
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: : •Low temperature < 450 C •Benign chemical environment •Benign radiation requirement System Integration Summary of steps •Circuit design and simulation •CMOS circuit fabrication at foundry •Co- and Post-IC MEMS fabrication •System packaging Micrograph of pressure sensor array MEMS pressure sensor array Electronics Hybrid or Modular Integration 3-D Packages 3-D Packages Folded Packaging Both passive and active components included in this hearing aid...
View Full Document

{[ snackBarMessage ]}

What students are saying

  • Left Quote Icon

    As a current student on this bumpy collegiate pathway, I stumbled upon Course Hero, where I can find study resources for nearly all my courses, get online help from tutors 24/7, and even share my old projects, papers, and lecture notes with other students.

    Student Picture

    Kiran Temple University Fox School of Business ‘17, Course Hero Intern

  • Left Quote Icon

    I cannot even describe how much Course Hero helped me this summer. It’s truly become something I can always rely on and help me. In the end, I was not only able to survive summer classes, but I was able to thrive thanks to Course Hero.

    Student Picture

    Dana University of Pennsylvania ‘17, Course Hero Intern

  • Left Quote Icon

    The ability to access any university’s resources through Course Hero proved invaluable in my case. I was behind on Tulane coursework and actually used UCLA’s materials to help me move forward and get everything together on time.

    Student Picture

    Jill Tulane University ‘16, Course Hero Intern