Lecture 18 MEMS CAD

Lecture 18 MEMS CAD - CAD Application to MEMS Technology...

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CAD Application to MEMS Technology Bruce K. Gale, University of Utah Acknowledgment: Nora Finch, Intellisense M. Mehregany, Case Western Reserve John R. Gilbert, Microcosm Technologies Abdelkader Tayebi, Louisiana Tech Definition of Computer Aided Design in Microsystems Technology In MEMS technology, CAD is defined as a tightly organized set of cooperating computer programs that enable the simulation of manufacturing processes, device operation and packaged Microsystems behavior in a continuous sequence, by a Microsystems engineer. Commercially Available Software • Coventorware from Coventor – http://www.memcad.com • IntelliSuite from Intellisense Inc. (Corning) – http://www.intellisense.com • MEMS ProCAETool from Tanner Inc. – http://www.tanner.com • MEMScap from MEMScap Inc. – http://www.memscap.com • SOLIDIS from ISE Inc. – http://www.ise.com MEMS CAD Motivation • Match system specifications – Optimize device performance – Design package – Validate fabrication process • Shorten development cycle • Reduce development cost 128 Transmitters 128 Receivers : : : : MEMS micro-mirrors Collimator Lens Arrays
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Example: IntelliSuite System M a t e r i l s d b Fabrication database A n o p c h m u Ma k Fabrication Simulation Solid Modeling Performance Analysis Thermo-electro- mechanical Piezoelectric Electromagnetic Thermal-fluid- structure Model courtesy of Auburn University Example: IntelliSuite Advantages • Design for manufacturability – Fabrication database – Thin-film materials engineering – Virtual prototyping • Ease of use – Consistent user interface – Communication with existing tools • Accuracy – MEMS-specific meshing and analysis engines – In-house code development – Validated by in-house MEMS designers – ISO certified for quality The Design Process • All systems have some common threads to their design – Device design • Design a manufacturable component – Package design • Design a practical package – System design • Design the system into which the device fits. • Goal: concurrent design at these levels MEMS CAD System Flow Device Modeling Device Modeling System Modeling System Modeling Package Design Package Design Process Design Process Design Layout Layout Manufacturing Data and QA Structures Manufacturing Data and QA Structures
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Types of MEMS Design •Cu s tom L ev e l • Design New MEMS in New Process • Goal: A New MEMS component •S em i
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This note was uploaded on 11/16/2011 for the course MSE 5960 taught by Professor Douglas during the Fall '04 term at University of Florida.

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Lecture 18 MEMS CAD - CAD Application to MEMS Technology...

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