Lecture 21 Optical MEMS

Lecture 21 Optical MEMS - Integrating Technologies Optical...

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Optical MEMS Fundamentals of Micromachining Dr. Bruce Gale With special thanks to Dr. Michael McShane Integrating Technologies Micro-Optics • Driven by communications industry – Couplers, demultiplexers, switches, routers, etc. – Display technology • Mostly elements , not complete systems – Thin-films – MEMS devices – Gratings – Lasers Categories of Optical MEMS • Sources • Waveguide Optics • Free-Space Optics • Transmissive Optics • Reflective Optics • Diffractive Optics • Interference-Mode • Detectors
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Sources • Thermal Emitters • Semiconductor Devices –LEDs – Laser Diodes • Edge-Emitting • VCSELs – Note that these devices using microfabrication techniques, but are not considered MEMS – Easily integrated • Polymer Emitters Semiconductor Lasers • Pumping usually with DC current (low power) • Many wavelengths available • Raw beams are elliptical/wedge shaped, astigmatic • Compact, low input power • Optical Power – 0.1-5mW typical – HP (to 100 W) available in arrays •C o s t – $15-$10,000 (goes ~ with power) Micro-Lasers •VC SE L –Ve r t
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SAM-patterned PMMA waveguides Waveguides: electromagnetic radiation “guided” via total internal reflection (n clad <n core ) Ultrafast Laser-written Guides Laser induces local n Integrated Bragg Gratings
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Lecture 21 Optical MEMS - Integrating Technologies Optical...

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