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Unformatted text preview: terminate at the channel inside wall, thus using the channel mask. 3. The interfaces for the fiber-to-planar optic connections are then patterned, in this case as a simple butt coupling. This step uses the waveguide interface mask. 4. Finally, the covering plate for the channel has the input/output ports etched into it, thus using the last channel ports mask. The relationship of these four masks is illustrated below, and the subsequent construction of each would be referenced using appropriate marks....
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- Fall '04