negresred - A Little Structural Organic Chemistry 3 benzene...

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R. B. Darling / EE-527 EE-527: MicroFabrication Negative Photoresists R. B. Darling / EE-527 A Little Structural Organic Chemistry - 1 alkanes: (no double bonds): H 3 C H 2 C H 2 C H 2 C H 2 C alkenes: (at least 1 double bond): H 3 C H C H C H 2 C H 2 C H 3 CCC H 2 C H 2 C alkynes: (at least 1 triple bond): [alkenes and alkynes are unsaturated hydrocarbons.] R. B. Darling / EE-527 A Little Structural Organic Chemistry - 2 RO H ROR ' R CHO R O CR ' R O C R O COR ' ROO H ROOR ' OH alcohol ether aldehyde ketone acid ester hydroperoxide peroxide CH 3 OH methanol HCHO formaldehyde HCOOH formic acid R. B. Darling / EE-527 A Little Structural Organic Chemistry - 3 OH benzene phenol toluene CH 3 CH 3 CH 3 CH 3 CH 3 H 3 C H 3 C (ortho-) xylene (para-) xylene (meta-) xylene ortho- means straight out meta- means beyond para- means opposite R. B. Darling / EE-527 Common Monomers and Their Polymers - 1 H 2 CC H 2 M O N O M E R P O L Y M E R H 2 H 2 polyethylene (PE) ethylene H 2 C CH CH 3 H 2 C CH Cl H 2 C CH n H 2 H CH 3 n propylene polypropylene (PP) H 2 H Cl n vinyl chloride polyvinyl chloride (PVC) H 2 H n styrene polystyrene (PS) R. B. Darling / EE-527 Common Monomers and Their Polymers - 2 M O N O M E R P O L Y M E R H 2 C CH CO O CH 3 H 2 H CO O CH 3 n methyl acrylate polymethyl acrylate (PMA) H 2 CO CH 3 O CH 3 H 2 CO CH 3 O CH 3 n methyl methacrylate polymethyl methacrylate (PMMA) H 2 C C H C CH 2 CH 3 H 2 H C CH 2 CH 3 n isoprene polyisoprene (PI) (2-methyl-1,3-butadiene) All rubbers are diene polymers
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R. B. Darling / EE-527 Common Monomers and Their Polymers - 3 HO O H H HO H HO OH H H OH HO O H H HO OH HO H H H OH D-glucose D-manose O O H H HO H HO OH H OH O O H H HO OH HO H H O OH cellulose R. B. Darling / EE-527 Atomic Weights hydrogen 1.0079 carbon 12.011 nitrogen 14.0067 oxygen 15.9994 silicon 28.0855 sulfur 32.06 chlorine 35.453 (distribution of isotopes gives rise to fractional atomic weights) R. B. Darling / EE-527 Molecular Weights ethylene C 2 H 4 2(12.011) + 4(1.0079) = 28.05 g/mole propylene C 3 H 6 3(12.011) + 6(1.0079) = 42.08 g/mole vinyl chloride C 2 H 3 Cl 2(12.011) + 3(1.0079) + 35.453 = 62.50 g/mole styrene C 8 H 9 8(12.011) + 9(1.0079) = 105.16 g/mole methyl acrylate C 4 H 6 O 2 4(12.011) + 6(1.0079) + 2(15.9994) = 86.09 g/mole methyl methacrylate C 5 H 8 O 2 5(12.011) + 8(1.0079) + 2(15.9994) = 100.12 g/mole isoprene C 5 H 8 5(12.011) + 8(1.0079) = 68.12 g/mole 1 mole is Avogadro’s number of particles: N A = 6.023 x 10 23 R. B. Darling / EE-527 Molecular Weight of a Polymer •M p = nM m • n = number of units m = molecular weight of monomer p = molecular weight of polymer • For use in a photoresist resin, need a molecular weight of around 100,000 - 200,000 for proper viscosity, melting point, softening point, and stiffness. • Example: – To get M p = 100,000 using isoprene (M m = 68.12 g/mole), need to get chains of average length of n = 100,000/68.12 = 1468 units. – This would lead to a molecule that is too long for proper photolithographic resolution, so need to coil the chains to make the lengths shorter and to increase the mechanical stiffness.
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This note was uploaded on 11/16/2011 for the course MSE 5960 taught by Professor Douglas during the Fall '04 term at University of Florida.

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negresred - A Little Structural Organic Chemistry 3 benzene...

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