Syllabus 2002 Utah MEMS

Syllabus 2002 Utah MEMS - Fundamentals of Microfabrication...

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Fundamentals of Microfabrication BIOEN 6421; ELEN 5221; MEEN 5960 and 6960 Class Time : Tuesday and Thursday 2:00-2:50 PM in EMCB 110 Lab sessions to be determined. Will be held in Microfabrication Teaching Lab Instructor: Dr. Bruce Gale Office: 3114 MEB Telephone: 585-5944 E-mail: [email protected] Office Hours: 3-5 PM Daily Other times by appointment Text: Fundamentals of Microfabrication , Mark Madou, CRC Press, ISBN: 0-8493-9451-1 Supplemental Texts: Microsystem Design, Stephen D. Senturia, Kluwer Academic Press, 2000. Other relevant microfabrication texts. Class Web Page: http://www.eng.utah.edu/~gale/ Objectives 1. To gain an understanding of standard microfabrication techniques and the issues surrounding them. 2. To know the major classes, components, and applications of microsystems and to demonstrate an understanding of the fundamental principles behind the operation of these systems 3. To understand the unique requirements, environments, and applications of microsystems. 4. To apply knowledge of microfabrication techniques and applications to the design and manufacturing of a microsystem. 5. To practice microfabrication techniques in a laboratory setting. 6. To make the study of microsystems enjoyable Grading Grading will be curved with students above the median receiving an “A”, students below the median and above one standard deviation below the median receiving a “B”. 1 to 2 standard deviations below the median will receive a “C”, 2 to 3 standard deviations below will receive a “D”, and anything lower will receive an “F”. Exam 1
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Syllabus 2002 Utah MEMS - Fundamentals of Microfabrication...

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