CH10 - Chapter 10: Thin Films Solid-Solid Interfaces...

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Chapter 10: Thin Films – Solid-Solid Interfaces Processed from the Vapor Nature Materials KEY CONCEPTS (Note the application of key concepts from previous chapters in the present discussion) What are different types of thin films and how are they deposited (interphase, epitaxial, PVD,CVD) ? What are the key characteristics of PVD, CVD film deposition techniques? How do thin films nucleate and grow (capillarity, homogeneous and heterogeneous nucleation) ? What are three modes of growth conditions (Volmer-Weber, Frank- van der Merwe , Stransky- Krastanov)? Which factors influence film growth kinetics? Which factors govern thin film stability (residual stress, annealing, defects) ? What are thin film applications (magneto-optical data storage, sensors, ?
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Chapter 10- Thin Films – Solid-Solid Interfaces Processed from the Vapor Phase Nature Materials Relevant text book sections for Chapter 10 10, 10.1, 10.1.1 - 10.1.5 10.2, 10.2.1, 10.2.2 10.3, 10.3.1, 10.3.1.1, 10.3.1.2, 10.3.2, 10.3.3, 10.3.4, 10.3.5 10.4 10.5 10.6, 10.6.1, 10.6.1.1, 10.6.1.2, 10.6.2, 10.6.3 10.7, 10.7.1, 10.7.4, 10.7.5, 10.7.6
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Chapter 10- Thin Films – Solid-Solid Interfaces Processed from the Vapor Phase Gas Behavior Vapor Deposition Processes Physical Vapor Deposition Chemical Vapor Deposition Nucleation and Growth of Thin Films Growth Modes Stability of Thin Films Nature Materials
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10.1 Ideal Gas Behavior can Describe the Porperties of the Vapor Phase under Most Vacuum Conditions Vapor deposition involves the transport from the gas phase to a solid surface, followed by either physisorption or chemisorption. Deposition is typically carried out in a vacuum environment. Atoms and molecules can typically be treated equivalently in the gas phase. 10.1.1 Gas(Vapor)-Phase Equation of State In terms of review, the number of atoms or molecules in the gaseous state found in a given volume is accurately calculated from the following equation of state. N v – number of gas molecules/volume, known as Number Density Discussions of vacuum are typically divided into 5 pressure ranges, over which a number of atomistic properties are observed to systematically vary. R kk Av PV n T nN T N T = = k v P NT =
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10.1.2 Kinetic Behavior of Gas Molecules The consideration of atoms and molecules in the gas phase begins with an understanding of velocity and velocity distribution. Because a collection of gaseous species will exhibit a spread of velocities, different values are calculated to reflect the character of the sample: Average velocity: RMS velocity: Ensemble average: From these values, a number of important parameters related to vapor- solid interactions are derived. (markers in the figure show, from left to right, the most probable, the average, and the rms speed) 2 3 1 k 22 mv T = 3k rms T v m = 8k T v m π =
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10.1.3 Mean Free Path Between Collisions The mean free path is defined as the distance a gas molecule will travel without colliding with another gas molecule.
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CH10 - Chapter 10: Thin Films Solid-Solid Interfaces...

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