6_Mobility_Boosters_in_Silicon_MOS_lecture2

1 1 d2e m 2 dk 2 heavy mass k k0 crystal direction

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Unformatted text preview: 2 Heavy Mass k = k0 Crystal Direction (3D) Light Mass ! Source: F. Boeuf (ST Microelectronics) Iso-energy surface of holes in the valance band of Si araswat tanford University 12 EE311/Strained Si 6 Surface orientation araswat tanford University 13 EE311/Strained Si Surface orientation K.Kuhn SSDM 08 araswat tanford University 14 EE311/Strained Si 7 Surface orientation : band structure K.Kuhn SSDM 08 araswat tanford University 15 EE311/Strained Si Surface orientation : experimental data PMOS araswat tanford University NMOS (110) pMOS is 2X better than (100) 16 EE311/Strained Si 8 Bandstructure nMOS : orientation dependence Packan IEDM 08 araswat tanford University 17 EE311/Strained Si Bandstructure pMOS : orientation dependence Packan IEDM 08 araswat tanford University 18 EE311/Strained Si 9 Bandstructure pMOS : orientation dependence Packan IEDM 08 araswat tanford University 19 EE311/Strained Si MASTAR demo araswat tanford University 20 EE311/Strained Si 10 pMOS : hole bands under strain (MASTAR) araswat tanford University 21 EE311/Strained Si pMOS : hole bands under strain (MASTAR) araswat tanford University 22 EE311/Strained Si 11 pMOS : hole bands under strain (MASTAR) ! "#$%#"&'()%*+,-)./01/2)34&&56778889+&:*9,'&7;<('#*94&;#= !""#$ !""#$ %&'()'(* +,-./011',& >%4,) [email protected])0!)BCCD 2'()'(* 30&1',& !""#$ !""#$ " #4. 54. 64. EF araswat tanford University 23 EE311/Strained Si pMOS : hole bands under strain (MASTAR) araswat tanford University 24 EE311/Strained Si 12 pMOS : hole bands under strain (MASTAR) araswat tanford University 25 EE311/Strained Si pMOS : hole bands under strain (MASTAR) araswat tanford University 26 EE311/Strained Si 13 Hybrid Orientation (HOT) araswat tanford University 27 EE311/Strained Si HOT by Direct Silicon Bonding araswat tanford University 28 EE311/Strained Si 14 (110) PMOS by HOT araswat tanford University 29 EE311/Strained Si (110) PMOS in FinFET ? •  (110) easily ach...
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This document was uploaded on 11/18/2011.

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