Unformatted text preview: kinetics follows a thermal activation energy (E act ) such as: j k ~ exp[- E act / k B T] where k B is Boltzmann’s constant and T is the absolute temperature. The growth rate limitation due to the mass transport of chemicals to the growing film follows a diffusion equation such as: j t ~ √ D / T where D is a diffusivity Using these equations, analyze the data of Figure 37 on page 214, for the growth of polysilicon. Estimate the activation energy E act , and the effective diffusivity D. Discuss in your own words the sensitivity of the growth rate to temperature in the two regimes of: (a) reaction kinetics -limited growth, and (b) mass transport -limited growth. Give the temperature ranges for the two growth rate limitations. Homework assignments will appear on the web at: http://www.ece.udel.edu/~kolodzey/courses/eleg667_016f05.html Note: On each homework and report submission, you must please give your name, the due date, assignment number and the course number....
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- Fall '08
- Chemistry, Chemical reaction, Chemical vapor deposition