101311-hw3-f011

101311-hw3-f011 - Department of Chemical Engineering...

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Department of Chemical Engineering Fall, 2011 University of California, Santa Barbara 1 CHE 140B Problem Set No. 3 Due Tuesday, October 18, 2011 Problem 1: The following data were obtained at 110 °C for the equilibrium adsorption of benzene on silica gel particles. Partial pressure of C 6 H 6 in gas, atm C 6 H 6 adsorbed, g mol/(g gel) 5.0 x 10 -4 2.6 x 10 -5 1.0 x 10 -3 4.5 x 10 -5 2.0 x 10 -3 7.8 x 10 -5 5.0 x 10 -3 17.0 x 10 -5 1.0 x 10 -2 27.0 x 10 -5 2.0 x 10 -2 40.0 x 10 -5 Determine how well the Temkin adsorption isotherm fits these data and estimate the values of the appropriate model parameters by analysis of its linearized form. Problem 2: Adsorption/desorption principles have direct application in fundamental processes of the microelectronics industry, particularly in Chemical Vapor Deposition (CVD). CVD is used to grow stable thin films of polycrystalline silicon and other materials for uses in semiconductor memories, transistors, and computer microprocessors. Consider the deposition of silicon from silane, SiH 4 . The
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101311-hw3-f011 - Department of Chemical Engineering...

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