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UNIVERSITY OF CALIFORNIA SANTA BARBARA
DEPARTMENT OF CHEMICAL ENGINEERING
CHE 142 and ChE 242: Microelectronics Processing
Spring 2003
List of things you should know (possible quiz questions)
Set # 2
1)
What is the functional form of the diffusion coefficient of a species in solids?
2)
What is the functional form of the diffusion coefficient of a species in gas?
Specifically what is the
form of the P and T dependence?
3)
What is mean free path?
Give an equation which may be used to estimate mean free path.
What is
the approximate mean free path of an Ar atom at 1 mTorr?
4)
What is the functional form of the thermal conductivity in a low pressure gas?
5)
What is MaxwellBoltzmann velocity distribution?
What is MaxwellBoltzmann speed
distribution?
6)
Sketch the MaxwellBoltzmann velocity and speed distributions for He and Ar at same temperature.
7)
Sketch the MaxwellBoltzmann velocity and speed distribution for Ar at room temperature and at
some higher temperature.
8)
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This note was uploaded on 12/29/2011 for the course CHE 142 taught by Professor Ceweb during the Fall '09 term at UCSB.
 Fall '09
 Ceweb
 Chemical Engineering, Electron

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