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chex42_question_set3_s2003

chex42_question_set3_s2003 - UNIVERSITY OF CALIFORNIA SANTA...

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UNIVERSITY OF CALIFORNIA SANTA BARBARA DEPARTMENT OF CHEMICAL ENGINEERING CHE 142 and ChE 242: Microelectronics Processing Spring 2003 List of things you should know (possible quiz questions) Set # 2 1) What is the functional form of the diffusion coefficient of a species in solids? 2) What is the functional form of the diffusion coefficient of a species in gas? Specifically what is the form of the P and T dependence? 3) What is mean free path? Give an equation which may be used to estimate mean free path. What is the approximate mean free path of an Ar atom at 1 mTorr? 4) What is the functional form of the thermal conductivity in a low pressure gas? 5) What is Maxwell-Boltzmann velocity distribution? What is Maxwell-Boltzmann speed distribution? 6) Sketch the Maxwell-Boltzmann velocity and speed distributions for He and Ar at same temperature. 7) Sketch the Maxwell-Boltzmann velocity and speed distribution for Ar at room temperature and at some higher temperature.
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