chex42_question_set5_s2003 - UNIVERSITY OF CALIFORNIA SANTA...

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UNIVERSITY OF CALIFORNIA SANTA BARBARA DEPARTMENT OF CHEMICAL ENGINEERING CHE 142 and ChE 242: Microelectronics Processing Spring 2003 List of things you should know (possible quiz questions) Set # 5 1) Explain how a plasma is created when an electric field is applied to the plasma. 2) Sketch a Paschen curve and explain why it loks the way it does. Explain why there is a critical electric field to obtain a plasma. 3) What are growth zones that determine the film growth morphology? Describe the film morphology and state when each is encountered. 4) Why do neutrals and electrons have different temperature in the plasma? Give typical ranges of the electron temperature in eV. 5) Using any molecule or atom as an example, write down the following electron impact reactions that occur in a plasma (a) ionization, (b) excitation, (c) dissociation, (d) dissociative attachment. 6) Sketch the dependence of ionization cross-section on eletron energy and explain why it lokos the way it does. Give typical order of magnitude estimates of various cross section and electron enrgy magnitudes on your plot (e.g., the maximums, thresholds, etc.) 7) Write down the Poisson’s equation and explain physically what it relates to. 8)
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This note was uploaded on 12/29/2011 for the course CHE 142 taught by Professor Ceweb during the Fall '09 term at UCSB.

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chex42_question_set5_s2003 - UNIVERSITY OF CALIFORNIA SANTA...

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