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Unformatted text preview: Modeling and Analysis of CVD Reactors Modeling and Analysis of CVD Reactors Fluid Flow u g P u u t u r r r r r 2 ∇ + + −∇ = ∇ + ∂ ∂ µ ρ ρ ∑ + ∇ = ∇ ⋅ + ∂ ∂ j j P Q T T u t T C & r 2 κ ρ Energy Transport i i kc R = Gas Phase Kinetics Surface Kinetics i i kc R = Boundary condts. Microscopic feature scale models Input Rxtr geometry Species Properties Process conditions (P, T, Q, etc.) Output Deposition Rate, Uniformity Film Composition, Dopant Profiles Step coverage, Morphology, Selectivity Depends on sophistication level of the model Species Transport i i i i i R c D c u t c + ∇ = ∇ ⋅ + ∂ ∂ 2 r Fluid Flow Considerations Fluid Flow Considerations ! Wide range of P (10 3 Torr-10-8 Torr) ⇒ different flow regimes ! Flow regimes determined by Kn, Re, Gr, Ra #s ! Knudsen # (Kn) determines whether the flow is continuum or molecular ! λ mf is the mean distance the molecules travel in between collisions ! If Kn<<1 and T is uniform, Re # determines flow characteristics...
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- Fall '09
- Fluid Dynamics, r Fluid Flow, Fluid Flow Considerations