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lecture_9_chex42

lecture_9_chex42 - Coupled Mass Transport and Reaction in...

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Coupled Mass Transport and Reaction in LPCVD Reactors Coupled Mass Transport and Reaction in LPCVD Reactors Dilute A in B e.g., SiH 4 in H 2 2R w 2R t r z z=- /2 z= /2 r=0 r=R w c=c b Separate reactor into two regions, intrawafer & annular
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