lecture_10_chex42

lecture_10_chex42 - Coupled Mass Transport and Reaction in...

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Coupled Mass Transport and Reaction in Horizontal CVD Coupled Mass Transport and Reaction in Horizontal CVD Reactors Reactors x y δ (x) d A d Q d u Re ~ a Re x a µ ρ δ = = = 5 1 Q , u ) TEG ( ) CH CH ( Ga , AsH , H 3 2 3 3 2 GaAs AsH ) CH CH ( Ga GaAs As Ga H C Ga H ) CH CH ( Ga H As AsH → + → + + → + + → 3 3 2 3 6 2 2 3 2 3 2 3 3 2 3 2 3 Where do these reactions occur? Depends on T profile and relative concentrations.
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Continuity Continuity Eqn Eqn : Convection : Convection -Diffusion Diffusion -Reaction Reaction Eqns Eqns Assumptions ! Deposition is limited by TEG flux to the surface ! As is available in excess and reacts with TEG heterogeneously to deposit GaAs ! TEG/AsH 3 is very dilute in H2 and do not react in gas phase ! Isothermal and T is uniform in BL and everywhere else ! Constant D i and density No rxn in the gas Steady state t c R c u c D i i i i i = + r 2
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This note was uploaded on 12/29/2011 for the course CHE 142 taught by Professor Ceweb during the Fall '09 term at UCSB.

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lecture_10_chex42 - Coupled Mass Transport and Reaction in...

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