lecture_13_chex42 - and S for common MBE materials...

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Molecular Beam Molecular Beam Epitaxy Epitaxy (MBE) (MBE) ! An evaporation method to bring the atoms to the surface one by one (almost like laying bricks) at very low pressures such that λ mf >>L ! Advantages: ! Precise layer by layer control of epitaxial films and doping ! Not complicated by transport effects ! No gas phase reactions ! Important Issues ! How quickly does the source evaporate? ! What is the deposition rate on the substrate? ! What determines uniformity? ! Growth mode and surface diffusion ! Defects
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Typical MBE Apparatus Typical MBE Apparatus
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