Molecular Beam Molecular Beam Epitaxy Epitaxy (MBE)(MBE)!An evaporation method to bring the atoms to the surface one by one (almost like laying bricks) at very low pressures such that λmf>>L!Advantages:!Precise layer by layer control of epitaxial films and doping!Not complicated by transport effects!No gas phase reactions!Important Issues!How quickly does the source evaporate?!What is the deposition rate on the substrate?!What determines uniformity?!Growth mode and surface diffusion!Defects
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