lecture_16_chex42

lecture_16_chex42 - Lithography Lithography ! Lithography...

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Lithography Lithography ! Lithography is the process of transferring two dimensional patterns (e.g., a circuit pattern) on a mask to an underlying film or substrate. ! Most often the mask is a light sensitive polymer which allows the patterns to be transferred onto the polymer film. Such a light sensitive polymer is called a photoresist . ! Photolithography uses ultraviolet radiation from a Hg light source (now we use excimer lasers) to transfer the pattern from the mask to the photoresist and is the dominant technology in IC fabrication today. ! Future generations of lithography make use of x-rays, electrons or focused ion beams instead of photons (light).
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Patterning thin films by Lithography Patterning thin films by Lithography
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Lithography is used many times in IC manufacturing and Lithography is used many times in IC manufacturing and complexity of the IC is measured in “mask levels” complexity of the IC is measured in “mask levels”
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Application of Application of photoresist photoresist
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This note was uploaded on 12/29/2011 for the course CHE 142 taught by Professor Ceweb during the Fall '09 term at UCSB.

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lecture_16_chex42 - Lithography Lithography ! Lithography...

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