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midtermsolutions_s2003

midtermsolutions_s2003 - UNIVERSITY OF CALIFORNIA SANTA...

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Unformatted text preview: UNIVERSITY OF CALIFORNIA SANTA BARBARA DEPARTMENT OF CHEMICAL ENGINEERING CHE 142 and ChE 242: Microelectronics Processing £0 W Spring 2003 Midterm Quiz (closed Book and closed notes, 50 minutes) May 16, 2003 l) (8 points, 5 minutes) What is the crystal structure of Si and GaAs? Give the appropriate Bravais lattice and the basis. What is the common name for these structures? How many Si atoms are there in the conventional unit cell of Si? Si hasmmammd Was-c. GQHS “004M- chuuelt Strum. Tho—aum‘fivm Can badmbeol b: an FCC Brewed: twee“ In canes? SE Mbmh centrist”? amp 8: mm: mm: on” (0.0-0)‘1W‘*m ”W 00*" CV4.V4: V43a Where-5‘ "m [artifice—malted. In ell-Deaf Giants the; 50.5.”: Cm'fiS cap 0k Gm “FM aiiCGMifi)“ 0““ A's mm air (W. W, Veda. ThP-F‘L m- 9 “Ms Gammrwflw 5‘ ”MW- 2) (12 points, 6 minutes) Draw an band diagram for and indicate the approximate location of the Fermi level at room temperature for a (a) intrinsic semiconductor (b) n-type semiconductor, and (c) p-type semiconductor. On diagrams for (b) and (0) show and label the donor and acceptor levels, respectively. mafia/cfiknbanci Ea / //(/z, r//// //g€c EC 54% E L—-¢——flflfi_fi_fi_’: Eb F —_ — _ —_ hm. tulle EF ””””””” k—Iaijkme. abWLJEE'j ECTATJ— " w 63/1- __ a -fi : 'u Ea Ev W W77 EV W E", mama band a) —-'t e. (a) u/ri‘rLuch. lelmd. (to ”—131393' ( P 3'? 3) (6 points, 1 minute) What is the band gap energy in $0; Si and GaAs‘? (Eg)s?oz_ 5.; 2ev 4) (10 points, 6 minutes) Sketch (neatly) a MOSFET and show the source, drain, and the gate. Show also the gate dielectric and the channel. / P—‘l‘jpe Suit-ISM channel 5) (4 points, 1 minute) What are the leading gate insulator candidates to replace Si02 in the next generation of MOSFETS? Hi0: , TIOL } %FOL)TQZOS (See page 9% ofi Com/phat) 6) (14 points, 7 minutes) Define and give the physical significance (interpretation and meaning) of the following dimensionless numbers: Re, Kn, Pc, PeT, (I), Gr. For each, say how they are useful. Please be clear and communicate your responses clearly. “Re. .-_ ued dawns“ {atom chamdmshhs , «2.45.3 lammur m» tut-mm four [a ‘ 31l— = W amide/y Vtm flaw—5 6t akoracl-ensh'archorauummfi 1,“th 0, WIN“ Kn Pe. 2'— LL L‘ _ mVleflmO-QS WPEW'lT r0012 mrMfltlQ/J (Qiafi‘flfia U“ Fwd? ”D wHuawe. mm: Mimi rate Cmvwcwe Tmtpfi‘rf’ m CMWA TD UAW\BA . “L. = 60anch keM'brO/pri" mile. dammit“ rdarl‘tixe, meh’l-ancL T = "— - . anaemia Mack mus pawl-Ta K MWWM‘LM Fast». dil‘hm SFMl’E’} :64 . @L _ K L :_ “mm“?! ”W’— mgm rotating. root-u flaw/5m be EB" W?“ ML dAvaflM owl Metere— MW WW5 roux-chairs or Mthf‘a 0w: Leaf. DL’TEFMuCi/M‘I— comm mam-1.5m l3 \Wl‘tmfl or n 0&— Gr ,3 1L naval! " W“ {firm Now-r , W3???WfifimfimfiiififilfiafifififiEflfy‘tfoiééraffle-518:3iii}?!a};fi‘i'ntflaémmmwm‘fiia'E'HmztrW:-Wa.m :‘cl.=FE'I'I‘K‘EEr‘N-‘afl‘:Wlewmwemrwirmwmfilmxwmmrvurvmwn---.--.-.-v..-..-.----..-..... .. ...... 7) (10 points, 6 minutes) Sketch how you expect the typical deposition rate to vary with temperature in a CVD reactor for several different flow rates. In your sketch, plot 10g of the rate versus MT. Show the deposition reaction and mass transport limited regimes on this plot. What does the slope of the curve in the reaction and mass transport limited regions tell you. rend-w“ LIA-talk A “Slope:- - E:- --I- 46113-3014 ma-t/olvofludho ' L5? Qeffiqm‘)‘. Manama cm 1) CON—r3”- a—p slcpca. - ‘72.. 8) (5 points, 2 minutes) What is the functional form of the diffusion coefficient of a species in solids? 9) (5 points, 2 minutes) What is the functional form of the diffusion coefficient of a species in gas? Specifically what is the form of the P and T dependence? 3) N Talia .n— ’P 10) (6 points, 4 minutes) What is mean free path? Give an equation which may be used to estimate mean free path. What is the approximate mean free path of an Ar atom at I mTorr? meow Minna, bedroom colstm 51. am Wow Malcm wfiHQ 3% {ohm gmbL—c- __._l_____ (Am‘pw low M '4me ENE? '-"'”alli‘fia’i‘rfimmm“???é‘iifméi’s!filfim‘lftfamedWfimfifimmhamlet:twmmmmmmmermmmmemm mymmrmanimate-maximmama-MW. ....... WWW ....... . WMWWWW 11) (10 points, 5 minutes) Sketch the Maxwell-Boltzmann velocity and speed distributions for He and Ar at same temperature. $017!) 12) (10 points, 5 minutes) Explain when one obtains each of the surface coverages Show below in a deposition process. Suagace, dxbflumem (“OWL ‘77 rate 01.7 pFQWSdY' mourn» Mm A v? w wvwe. A {*5 m drug—finish 1&5an Amp ‘:>> LA) [Gw— mecuvx foe». pwtln commreck {‘0 Rectum. an Sta—had» some. pawl—s11 LB myatvm are. shadowed. gm? <4 N. WMWWMth "Top Carma {ease WEN 5W?— Bfimmfi—B *4 " W “[2. I ' '- """"""" - n '- ' —xx_ - . - W: .. .4 . . smxum mm. mm. N.-,.~u\‘:.w.--.-y---.-.-m.-..-:::.«.-..: .............. .. ....................................................... 'W¥4§m§mmwi‘mfi'253Kwétfifii-TémfigfiihfiMfiWJu-wmémwmwfimm”.mlvwm mrmmmmwm m,- . w ...
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