optimize%20the%20design%20of%20micromotor

optimize%20the%20design%20of%20micromotor - ABCM Symposium...

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OPTIMIZED DESIGN OF AN ELECTROSTATIC SIDE-DRIVE MICROMOTOR Humberto Ferreira Vinhais Escola Politécnica da Universidade de São Paulo Av. Prof. Mello de Moraes, 2231, São Paulo –SP – 05508-900 humberto.vinhais@poli.usp.br Paulo Henrique de Godoy Escola Politécnica da Universidade de São Paulo Av. Prof. Mello de Moraes, 2231, São Paulo –SP – 05508-900 pegodoy@uol.com.br Emilio Carlos Nelli Silva Escola Politécnica da Universidade de São Paulo Av. Prof. Mello de Moraes, 2231, São Paulo –SP – 05508-900 ecnsilva@usp.br Abstracts. Recently, electrostatic motors have gained a new international perspective with the technology of micro-manufacturing of MEMS (Micro-Electromechanical systems). The micromotors have becoming more popular in scientific research in diverse fields of engineering: as the development of high-quality scanners, micro-optical switches for fiber-optic networks, new endoscopes for invasive surgeries with larger viewing scopes, etc. An electrostatic side-drive motor is essentially driven by electrostatic forces: the induced electric loads in the rotor are attracted by electric loads of the stator, generating an electrostatic force which creates a mechanical torque in the rotor of the micro-motor. Even though, plenty of work was developed related to the manufacturing of the micromotors, there are only a few studies in literature about their design using computational and mathematical approaches. Thus, in this work optimization techniques are applied to obtain the optimized topology of the electrostatic micromotor rotor aiming to maximize its final torque. This work is divided in three different steps towards the optimized design of an electrostatic side-drive micromotor: computational simulations using the Finite Element Method (FEM), through commercial software ANSYS to analyze the influence of the design variables in the final torque; microfabrication of LIGA-like micromotor prototypes using photolithography and electrodeposition (with assistance of LNLS); and the development of an optimized design of an electrostatic side-drive micromotor applied to MEMS using Topology Optimization Method (TOM) to maximize the rotor mutual energy and, consequently, its torque. Keywords . electrostatic side-drive micromotor, MEMS, topology optimization, computational simulation, LIGA-like fabrication 1. Introduction The electrostatic motors had been the first electric motors developed in history. The first electrostatic motor was developed in 1742 (Tai, 1995). These motors had not attracted scientific interest until 1980, when they begun to be manufactured in micro-scale. With the development of new micro-manufacturing techniques and with the widespread use of MEMS ("Microelectromechnical Systems"), great opportunities for the electrostatic micromotors had been opened. Recently, in July of 2003, University of California developed the smallest motor of the world, an electrostatic micromotor of 500 nanometers, 300 times lesser than the diameter of a human hair.
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optimize%20the%20design%20of%20micromotor - ABCM Symposium...

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