ECE_220A_Lecture_18_Nov_22_2011_slides

ECE_220A_Lecture_18_Nov_22_2011_slides - Chemical Vapor...

Info iconThis preview shows pages 1–9. Sign up to view the full content.

View Full Document Right Arrow Icon
Chemical Vapor Deposition
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Figure 13.1 A simple prototype thermal CVD reactor. Chemical Vapor Deposition SiH 4 (g) Si(s) + 2H 2 (g) T wall T wafer S.A. Campbell “Fabrication Engineering at the Micro- and Nanoscale” Where does the reaction take place? Uniformity of deposition?
Background image of page 2
Discuss CVD chemistry and issues
Background image of page 3

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Figure 13.3 A simple model of the surface of the wafer during silane CVD includes adsorbed SiH 4 and SiH 2 . S.A. Campbell “Fabrication Engineering at the Micro- and Nanoscale”
Background image of page 4
Tuomo Suntola and Jaakko Hyvärinen, Ann. Rev. Mater. Sci. 15 , 177 (1985)
Background image of page 5

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Figure 13.4 Flow development in a tubular reactor. The gas enters with a simple plug flow on the left and exits with a fully developed parabolic flow. S.A. Campbell “Fabrication Engineering at the Micro- and Nanoscale”
Background image of page 6
Figure 13.5 (A) Gas flow as predicted by a parabolic flow model and in the stagnant layer approximation. (B) Stagnant layer thickness versus position assuming a plug flow inlet. S.A. Campbell “Fabrication Engineering at the Micro- and Nanoscale”
Background image of page 7

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Flow field for a square cross section CVD reactor showing roll cells (after Moffat) . S.A. Campbell “Fabrication Engineering at the Micro- and Nanoscale”
Background image of page 8
Image of page 9
This is the end of the preview. Sign up to access the rest of the document.

This note was uploaded on 01/16/2012 for the course ECE 220a taught by Professor Staff during the Spring '08 term at UCSB.

Page1 / 28

ECE_220A_Lecture_18_Nov_22_2011_slides - Chemical Vapor...

This preview shows document pages 1 - 9. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online