ECE_220A_Lecture-5_Oct_6_2011_slides

ECE_220A_Lecture-5_Oct_6_2011_slides -...

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!"#$%&')$#*+,-&"*. /0/112345&#1673 89:$:# $;&,9< =$:#&>%9 ?9#@99> ;&:A &>B :C?:#-&#9 You need good contact between the sample and mask Contact alignment
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!"#$%&')$#*+,-&"*. /0/112345&#1673 !"#$%&' 8-+9:%#$+; <.=#:>
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!"#$%&')$#*+,-&"*. /0/112345&#1673 !"#$%&' 89#:"":-;< http://www.mse.vt.edu/faculty/hendricks/mse4206/GaAsTEK/Lithography/ladv.htm#Section4 =>?@&A:?#&'; +B 5$%-+B&C-$%&#$+?D 5E 5&@+>
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Planarization is important How do get a planar surface?
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Polyimide Density 1430 kg/m 3 Young's modulus 3.2 GPa Tensile strength 75–90 MPa Elongation @ break 4–8% notch test 4–8 kJ/m Glass temperature >400 °C melting point none Vicat softening point 220(?) °C[1] Thermal conductivity 0.52 W/(m·K) CoefFcient of thermal expansion 5.5 × 10 5 /K SpeciFc heat capacity 1.15 kJ/(kg·K) Water absorption (ASTM) 0.32 Dielectric constant at 1 MHz 3.5 http://en.wikipedia.org/wiki/Polyimide
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!"#$%&')$#*+,-&"*. /0/112345&#1673 As the surface gets exposed it gets more transparent increasing exposure for resist further down
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Diazonaphthoquinone 2-Diazo-2 H -naphthalen-1-one Other names
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ECE_220A_Lecture-5_Oct_6_2011_slides -...

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