ECE_220A_Lecture_10_Oct-25-2011-slides

ECE_220A_Lecture_10_Oct-25-2011-slides - Oil Free (Dry)...

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Unformatted text preview: Oil Free (Dry) Backing (Roughing) Pumps Diaphragm Pump 1-10 torr Reciprocating Piston Pump >2x10-2 torr Scroll Pump >8x10-3 torr Figure 10.9 Cutaway view of a diffusion pump (courtesy Varian). Diffusion Pump Diffusion Pump Figure 10.10 Cutaway view of a small turbomolecular pump. Notice the change in the blade angle and shape going from the high vacuum (top) to low vacuum (bottom) ends (courtesy Varian). Turbo-Drag hybrid pump from Edwards Figure 10.11 Pumping speed and compression ratio of a typical turbo pump as a function of inlet pressure for several representative gases (courtesy Leybold). Radiation baffles ~10 K Cryopump Absorbs gases, which will be released upon warming up Ion Pump Ion Pump Good for UHV not for gas loads 10-4 - 10-11 Torr from Pfeiffer “Vacuum Technology” !"#$%&'"()* !"#$%&'($)*+"#$%&'($)*+"#$%&'($*,-. &$*%/#*%/&(*0&12*3*4'25'"(6*'7*$&(81#*#1#2#(%9 . &$*&%$*$%7"4%"7#*47&%&4319 . 6'#$*&%*/3:#*%'*;#*<#5&%3=&31>?*/3:#*3*"(&+"#*7#13%&'($/&5*%'*%/#*$";$%73%#9 ('%*#5&%3=&31,-;"%*@#*@&11*1''A*3%*B'1#4"137*C#32*D5&%3=E . @/3%*&$*%/#*$'"74# '0*%/#*23%#7&31*F1&+"&6)*$'1&6)*83$G @#*@&11*$%37%*@&%/*$'1&6*$'"74#$ . @/3%*&$*%/#*;#$%*@3E '0*%73($5'7%&(8*%/#*23%#7&31*07'2*$'"74#*%'*$";$%73%#9 @#*@&11*%73($5'7%*%/#*23%#7&31*%/7'"8/*83$*5/3$# H/E$&431*I35'7*J#5'$&%&'(** F3$*'55'$#6*%'*K/#2&431*I35'7*J#5'$&%&'(G LNP- 83$M5/3$#*%73($5'7%?*@/3%*&$*&25'7%3(%*/#7#9 O'@*6'*@#*%3A#*3*$'1&6*$'"74#*3(6*%73($0'72*&%*&(%'*:35'7*5/3$#9 3- F6'#$*/'@*@#*6'*%/&$*23A#*3(E*6&00#7#(4#*%'*%/#*0&(31*0&129G O'@*6'#$*%/#*%/&(*0&12*&(%#734%*@&%/*%/#*$";$%73%#9 3- O'@*6'*2347'$4'5&4*4'(%7'1$*&(01"#(4#*%/#*2&47'$%7"4%"7#*'0*%/#*%/&(* 0&129 !" #$%&'()*%&(+,-%*(.&-./01(%/('23'$*,$1(,/4(53%2/61(%))7 8" #$%&'()*%&(+,-%*(5-9:'.'%*37(%/$%('23'$*,$1;(<.$9('%&1('2*),61( &%3.=.$: >" ?26=1,$.%/@(6=2'$1*'(%)(,$%&'()%*&;(32$(.'=,/4('.A1(&,:(31( 2/'$,3=1 = !" 3" 9" =" #$%&'()&*+,*-'+.&*/%0$(-'(*'+*,+).*1&$-/2& 4+.(*1&$-/2&*-)(*5%/&'-6$(7"*4'-6$(*1&$-/2&*1/0)(-&(*1/*&18(" :)+;1/<*1&$-/2&*.(('*-'*<)-1/*6+%/2-)1(&" >&*'?1&*,1$.*&')%0'%)(*&'-6$(@*A?-'*?-BB(/&*1,*C+%*B%'*-221'1+/-$* (/()<C*1/'+*'?(*,1$.@ Evaporation ...
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