ECE_220A_Lecture_11_Oct-27-2011-slides

ECE_220A_Lecture_11_Oct-27-2011-slides - Thermal...

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Unformatted text preview: Thermal Evaporation Thermal Evaporation System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from http://www.veeco.com/images/library/VaporPress1B_large.jpg http://www.veeco.com/images/library/VaporPress2b_large.jpg Deposition of GaAs from http://www.veeco.com/images/library/VaporPress1B_large.jpg As http://www.veeco.com/images/library/VaporPress2b_large.jpg Ga Binary Semiconductor (like GaAs) Congruent evaporation when J vM = 2 J vY 2 GaAs vapor pressure...
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ECE_220A_Lecture_11_Oct-27-2011-slides - Thermal...

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