IE 370 Lecture 24

IE 370 Lecture 24 - 4. What are the processes to Remove...

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Lecture 24 Head up notes. Name: 1. Processing Sequence in Photolithography for patterning Silicon 2. What are the processes to add (deposit) thin films? 3. What is the process mechanism of the following deposition: Thermal oxidation Chemical vapor deposition Sputtering Metallization (by CVD, PVD, vaporization, or electroplating)
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Unformatted text preview: 4. What are the processes to Remove (etch) thin films? Plasma Reactive etching (dry etching) Web etching 5. What are the doping methods, and there difference? (ion implantation and thermal diffusion) 6. Process flow of fabrication of transistor...
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This note was uploaded on 01/17/2012 for the course IE 370 taught by Professor Cheng during the Spring '11 term at Southwestern.

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