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Unformatted text preview: 4. What are the processes to Remove (etch) thin films? Plasma Reactive etching (dry etching) Web etching 5. What are the doping methods, and there difference? (ion implantation and thermal diffusion) 6. Process flow of fabrication of transistor...
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This note was uploaded on 01/17/2012 for the course IE 370 taught by Professor Cheng during the Spring '11 term at Southwestern.
- Spring '11